ISSN 0862-5468 (Print), ISSN 1804-5847 (online) 

Ceramics-Silikáty 55, (1) 36 - 42 (2011)


EFFECT OF SOL CONCENTRATION AND SUBSTRATE TYPE ON MICROSTRUCTURE FORMATION OF PZT THIN FILMS
 
Bruncková Helena, Medvecký Ľubomír
 
Institute of Materials Research, Slovak Academy of Sciences, Watsonova 47, 040 01 Košice, Slovak Republic

Keywords: Sol-gel, PZT thin films, Spin-coating, Perovskite phase
 

Pb(Zr0.52Ti0.48)O₃ (PZT) sols were prepared by a modified sol-gel route using both solvents - acetic acid and stabilizer solution (n-propanol : 1,2-propanediol in the rate 10 : 1). The sols were deposited by spin-coating onto platinized Al₂O₃ or SiO₂/Si substrates. Results of SEM and XRD analyses confirmed, that the transformation of the amorphous PZT film to perovskite structure happened after sintering at 650°C. The mechanism of microstructure formation has described for morphologicaly different perovskite particle types in 1, 2 and 3-layered PZT thin films with thickness of 200-500 nm on used substrates. Three different PZT film microstructure types in dependence on the applied sol concentration were found. It was found, that the PZT/Pt/Al₂O₃ film microstructure at 1.0 M sol concentration was composed of two forms of perovskite particles, big rosette and irregular cuboidal particles. Small spherical particles and rosette structure were found in PZT/Pt/Si/SiO₂ films.


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