Ceramics-Silikáty 41, (1) 7 - 12 (1997)

Silica particles were synthesised by oxidation of tetraethylorthosilicate (TEOS) vapour in tube furnace reactors of 27 and 37 mm inner diameter. Particles production was studied as a function of reactor diameter, residence time of the reaction mixture in the reactor, TEOS concentration, geometric mean diameter and geometric standard deviation of generated particles. Smaller and more monodisperse particles were prepared in the larger reactor. Particle size and dispersity increases with temperature and TEOS concentration whereas number concentration is quite insensitive to the experimental conditions investigated.